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MEMSnet Home: MEMS-Talk: Silicon Oxinitride
Silicon Oxinitride
1999-01-21
Manolo
Silicon Oxinitride
Manolo
1999-01-21
Hello!

I want to know the silicon oxinitride (NxOySi) Young Modulus and
Poisson number values.

Could you send me any information about it?

Thanks,

Manolo.


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