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MEMSnet Home: MEMS-Talk: Re: Thick Resists for Au plating
Re: Thick Resists for Au plating
1999-02-10
Shekhar Bhansali
1999-02-10
Shekhar Bhansali
1999-02-10
Keith Jackson
1999-03-01
Mark Wendman
Re: Thick Resists for Au plating
Keith Jackson
1999-02-10
> Hi,
>
> I'm looking for resists that can be spun up to around 25 microns and have
> good compatability with alkaline (pH=10) gold sulfite plating bath. We are
> using SJR 3740 but are interested in other alternatives. We tried SU-8
> but can't find anything to remove it. Is there anything else available?
>
> Thanks,
>
> Todd Green
>
>
I have been using shipley 5740 with thickness up to 52um for this type of
application.

--
Keith Jackson
Lawrence Berkeley National Laboratory
Berkeley,Ca 94720
510-486-6894 voice
510-486-4955 fax


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