Hello Andreas,

In my opinion, at great deflection, the output of the actuator couldn't
be linear because the mechanical parameter is different from that at
small deflection angle. And the mechanical parameter decide the resonant
frequency.

Yahong Yao
705K University Village
Columbia, MO 65203
Tel: (573)771-0382
email:[email protected]


On Wed, 10 Feb 1999, Andreas Ehrlich wrote:

> Dear Colleagues
> starting my work on MEMS I would appreciate if anybody can send
> me some information about control of electrostatic driven actuators
> in the instable regime. Especially I am interested in control
> mechanisms to keep the actuator output linear at great deflection
> angles. Any information about latest breakthroughs would be highly
> appreciated. Thanks in advance
>
> Andreas
>
> ==================================
> Dr. Andreas Ehrlich
> Erwin Sick Engineering GmbH
> Bergener Ring 43
> D-01458 Ottendorf-Okrilla
> GERMANY
> Phone: (+49) 35205/524-42
> Fax:   (+49) 35205/524-22
> Email: [email protected]
> ===================================
>
>
>