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MEMSnet Home: MEMS-Talk: Re: etching process
Re: etching process
1999-02-16
Andreas Ehrlich
Re: etching process
Andreas Ehrlich
1999-02-16
Dear Emre,

a very useful tool (SIMODE) for etching simulation can be found at
http://www.gemac-chemnitz.de
Demo-version available.

Regards

Andreas Ehrlich


Date:          Fri, 12 Feb 1999 11:40:36 -0800
From:          sezai emre tuna 
Reply-to:      [email protected]
Subject:       etching process
To:            [email protected]

I want detailed information about etching process. Any kind of replies
will be appreciated. Thank you.

emre tuna


reply
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