Todd -

Generally I use HMDS on SiO2 or nitride layers, Cleaned cilison or metal
layers should probably not require such coatings before PR applications,.

Regards,

Mike Rosa.

At 12:48 AM 2/16/99 PST, you wrote:
>Is HMDS useful as a resist adhesion promoter on substrates other than
>silicon? We use HMDS before applying resist to a gold coated wafer and I
>was wondering if this would have any benefit on gold-resist adhesion.
>
>Thanks,
>
>
>Todd
>
>
>
>

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