Try Saif and MacDonald (1995), do not recall the title, they made a device
for measuring


At 04:19 PM 1/20/99 -0600, LI LI wrote:
>Does anyone know where I can find an instrument that can measure a 15
>micrometers deflection of a MEMS structure with a load in mili-Newton
>range? The sample is a doubly supported beam which is 200 micrometers long
>and 100 micrometers wide and 10 micrometers thick.
>Thanks in advance.
>
>
>
>----------------------------
>Li Li
>Dept. Mechanical Engineering
>University of Arkansas
>Fayetteville, AR 72701
>Tel: 501-521-9890
>Fax: 501-575-6982
>E-mail: [email protected]
>----------------------------
>
>
>