Hello Steven,

In my experience, EDP is best. Please tell us your experienment results.
Contact me via: [email protected]

Yahong

On Fri, 19 Feb 1999, Steve Forgrieve wrote:

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> I am using a boron etch stop to build a hinge on silicon. What is the
> best anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.
>
> --
> Steve Forgrieve
> Department of Electrical Engineering
> The University of Edinburgh
> King's Buildings
> Mayfield Rd
> Edinburgh EH9 3JL
> (Int +44) 131 650 5665 (enquiries)
> email: [email protected]
>
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> 
> I am using a boron etch stop to build a hinge on silicon. What is the best
> anisotropic etchant to use. I am considering KOH, TMAH, EDP, etc.
> 
-- 
> Steve Forgrieve
> Department of Electrical Engineering
> The University of Edinburgh
> King's Buildings
> Mayfield Rd
> Edinburgh EH9 3JL
> (Int +44) 131 650 5665 (enquiries)
> email: [email protected]
>  
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