Mark,
We offer a Xenon Difluoride etch system. Please check out our web site at:
http://www.xetch.com
Kyle Lebouitz
**********************************************
* Kyle S. Lebouitz, Ph.D.
* President & CEO
* XACTIX, Inc.
* PO Box 81767
* Pittsburgh, PA 15217-0767
* (412) 680-1173 tel.
* (412) 622-0135 fax
* [email protected]
**********************************************
-----Original Message-----
From: Mark Bachman [SMTP:[email protected]]
Sent: Friday, February 19, 1999 9:24 PM
To: [email protected]
Subject: Supplier of XeF2 etching equipment?
Dear MEMS group,
We would like to do some Xenon Diflouride etching on silicon. Before we
build an etching station from scratch, I wonder if anyone knows of a
manufacturer or vendor who supplies such a station.
Any help will be appreciated.
-Mark Bachman.
--------------------------------------------
Mark Bachman, Ph.D.
[email protected] / 949-824-6421 (-3732 fax)
Research Physicist, Microsystems Engineering
University of California at Irvine
