The general answer to your question is YES, but its very dependent on
process conditions and substrates

D Tolfree
FFNW

-----Original Message-----
From: Sung Jin [mailto:[email protected]]
Sent: 20 February 1999 2:56 AM
To: [email protected]
Subject: Sputtered films vs Evaporated films


Do sputtered films have in general higher stress levels than evaporated
films?

I am interested in general trends between the two modes of deposition.

Thank you.

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