Hello,

HMDS attached to the oxide layer on silicon, so I don't think it has an
effect on gold (since there is no oxide).

good luck!
Thara Srinivasan

On Tue, 16 Feb 1999, Todd Green wrote:

> Is HMDS useful as a resist adhesion promoter on substrates other than
> silicon? We use HMDS before applying resist to a gold coated wafer and I
> was wondering if this would have any benefit on gold-resist adhesion.
>
> Thanks,
>
>
> Todd
>
>
>