According to my colleague, Applied Materials and STS all supply XeF2 etching
equipment.  Check out their own web page for more info.

        -----Original Message-----
        From:   [email protected] [SMTP:[email protected]]
        Sent:   Saturday, February 20, 1999 10:24 AM
        To:     [email protected]
        Subject:        Supplier of XeF2 etching equipment?

        Dear MEMS group,

        We would like to do some Xenon Diflouride etching on silicon. Before
we
        build an etching station from scratch, I wonder if anyone knows of a
        manufacturer or vendor who supplies such a station.

        Any help will be appreciated.

        -Mark Bachman.

        --------------------------------------------
        Mark Bachman, Ph.D.
        [email protected] / 949-824-6421 (-3732 fax)
        Research Physicist, Microsystems Engineering
        University of California at Irvine