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MEMSnet Home: MEMS-Talk: Re: Etching Mask for BSG(Corning 7740)?
Re: Etching Mask for BSG(Corning 7740)?
1999-02-23
Jayant Neogi
1999-02-23
John Klemic
1999-02-24
Lee Jia-Hong
1999-02-24
[email protected]
1999-02-25
Thierry Corman
1999-02-25
Lee Jia-Hong
1999-03-05
Lee Jia-Hong
1999-03-03
Chialun
Re: Etching Mask for BSG(Corning 7740)?
Lee Jia-Hong
1999-02-24
Hi, John:
    In fact, my microchannel is quite big... many undercut (isotropic)
    need 400 mu deep (R), 700~800mu wide (2R)
    for electrophoresis...

    If any experiences to be share, I will appreciate it!
    Thanks!
Sincerely,
____________________________________________
Jerry Lee
(Jia-Hong Lee)
Insitute of Applied Mechanics,
National Taiwan University
Taipei, Taiwan, ROC
e-mail:
[email protected]
[email protected]
"Try then error is better than no try"


>How deep, how wide, how long, how many?
>>I know is Cr/Au, but I really don't know if it can resist deept etching
>>about 320 mu m...


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