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MEMSnet Home: MEMS-Talk: Re: In-situ Boron doping of polysilicon
Re: In-situ Boron doping of polysilicon
1999-03-05
Lynn Rathbun
Re: In-situ Boron doping of polysilicon
Lynn Rathbun
1999-03-05
3" square silicon...

We can do doped poly.

rsvp to   [email protected]


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>Does anybody know a source for CVD of in-situ boron doped polysilicon?
>I want to do this on 3" squre substrate.
>
>Please let me know.
>
>Thanks
>
>Matt
>

>


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