Hi mems community !

I'm working on the design of a micro-manipulator using adhesion forces  with a
gold coated monocrystal silicon cantilever (600x140x10 microns), attached to a
piezzo accelerator on one end and free on the other. We've got problems on
describing with precision the dynamic behavior of the beam (elastic, of course).
We are currently trying somr finite elements software (abaqus) but they are  not
friendly on dynamic. Any information or referance will be welcome... Thanx

Sinan HALIYO
LABORATOIRE DE ROBOTIQUE DE PARIS - Universite Paris 6
[email protected]
(33) 1 39 25 49 74