no inorganic material that I know of.
you might consider a polymer for the hinge, it won't break, but polymers
will have
their own set of challenges.

and if you were a process engineer, you would avoid the design constraint
you are imposing on yourself - build what is buildable.

----------
> From: Rose Zhang 
> To: [email protected]
> Subject: MEMS: micro-mirror
> Date: Friday, March 05, 1999 6:44 AM
>
> Hello!
>
> We are trying to design a micro-mirror with a deflection angle of 40 to
45
> degree. However, if we use torsion hinge, the stress of the hinge at 45
> degree exceeds the yield strength of most materials. I wonder whether you
> have any suggestion about what materials and what hinge types are best
> suitable for this kind of application.
>
> Your help would be greatly appreciated.
>
> Rose Zhang
> Photonics Materials & Processes
> Nationa Optics Institute
> 369 rue Franquet, Ste-Foy
> Que, Canada
> Tel: (418)657-7406x506
> Fax:(418)657-7009
>
>