I recently came across a polyimide joint technique for out of the plane
rotation.  It involves etching v-grooves, and then filling these with
polyimide.  When cured, the polyimide shrinks, rotating a portion of the
substrate out of the plane.

Thorbjorn Ebefors, in Sweden, was the author of the articles I was
reading.  You could try talking to him.  His e-mail is
[email protected] .
--
Michael Colgan
University of Alberta- MicroFab
#318 Newton Research Bldg.
Edmonton, AB
Canada T6G 2G7
Telephone:      (780) 492-5570 Ext. 273
Fax:            (780) 492-1643
e-mail:         [email protected]