Dear MEMS community,
We are currently looking for tools for silicon wet etching of 4" wafer in KOH
with a proteection of one (active) side of the wafer.
We need a highly reliable mechanical tool for our production line, with very low
induced mechanical stress.
Does anyone know a qualified supplier for such a tool?
Regards
Olivier LEFORT
Microsensor design manager
Sensor Unit
SEXTANT Avionique
Phone : 33 4 75 79 85 19
Fax : 33 4 75 79 86 06
[email protected]
