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MEMSnet Home: MEMS-Talk: Obtaining Polyimides/Vias in Polyimides
Obtaining Polyimides/Vias in Polyimides
1999-01-28
[email protected]
Obtaining Polyimides/Vias in Polyimides
[email protected]
1999-01-28
     Hello,

     I need some information on how to obtain spin-on polyimides
     (vendors, manufacturers, etc). I am looking to deposit
     5-15 micron thick films.

     Also, does anyone have any experience with via formation in
     polyimides using the laser ablation technique. I need to
     fabricate vias with tapered sidewalls (i.e., top via pad
     is larger than bottom via pad)...

     Thanks for your help,

     Avinash Kane
     Raytheon Systems Company
     [email protected]


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