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MEMSnet Home: MEMS-Talk: Test Metods for anodic bonded Devices?
Test Metods for anodic bonded Devices?
1999-03-23
Roy Knechtel
Test Metods for anodic bonded Devices?
Roy Knechtel
1999-03-23
Hello,


I have to test anodic bonded Devices. Can anybody send me some
informations about the following test-topics.


1. Bond Strength (static, dynamic Tets)

2. Hermeticity

3. mechanical Stress

4. Life-Time Prediction


and other Tests if known.



Thanks=20


Roy Knechtel


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