Hi MEMS,

May I know will there be a big different in the Transverse and longitudinal
piezo-resistive
coefficient between polysilicon and silicon. If lets say I am using
polysilicon for my sensor,
can I use silicon as my material properity for my simulation??

And :-

n-type silicon:-
resistivity  = 11.7 (ohm cm)
p11           = -102.2
p12           = 53.4
p44           = -13.6


P-type silicon:-
resistivity = 7.8 (ohm cm)
p11          = 6.6
p12          =-1.1
p44          = +138.1


Best regard

AJ Pang






-----Original Message-----
From: [email protected] 
To: [email protected] 
Date: 15 March 1999 04:16
Subject: Polysilicon - piezoresistive coefficients


>I'm looking for the transverse and the longitudinal piezoresistive
>coefficients in the case using polysilicon thin film .... Thanks ...
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