Hello Olivier,

According to my information there are only two companies who have already
developed their own wafer tools for KOH etching with an electrochemical
etch stop. All other companies I'd contacted offer wet benches and are
ready to develop wafer tools but have no experience yet. Please contact:

Mr. Hans Moritz,
Hans Moritz Design
Lindenberg Str. 30
D-34253 Lohfelden
Germany
Tel. +49 561 515181
FAX: +49 561 518166
e-mail: [email protected]

Mr. John Carnevale
Technical Systems & Service Inc.
Phone:  001 (513)563-1115
FAX:    001 (513)563-1546
e-mail: [email protected]

Regards,
Roumiana Paneva

At 13:54 12.03.99 +0100, you wrote:
>Dear MEMS community,
>
>We are currently looking for tools for silicon wet etching of 4" wafer in
KOH with a proteection of one (active) side of the wafer.
>
>We need a highly reliable mechanical tool for our production line, with
very low induced mechanical stress.
>
>Does anyone know a qualified supplier for such a tool?
>
>Regards
>
>Olivier LEFORT
>Microsensor design manager
>Sensor Unit
>SEXTANT Avionique
>Phone : 33 4 75 79 85 19
>Fax : 33 4 75 79 86 06
>[email protected]
>
>

        Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11