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MEMSnet Home: MEMS-Talk: Re: Etching Teflon
Re: Etching Teflon
1999-03-11
Fred Tepper
1999-03-11
Alexander Shenderov
1999-03-11
Jonathan Bernstein
1999-03-11
Fred Tepper
1999-03-11
Yohannes
1999-03-23
[email protected]
Re: Etching Teflon
[email protected]
1999-03-23
We are doing some plasma etching of PTFE materials here at Trion Tech. Usually
thin layers and conditions of the reactors are approximate to what is used for
etching various oxides of silicon ie CF4, CHF3, ect.  Bob Henderson
602-968-8818


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