Dear Sung Jin,
Parylene C might be considered to be vacuum deposited.
The dimer is sublimed, then this gas is passed through
a furnace at 700 degrees C, where the dimer breaks down
into monomer molecules.  The monomer gas is then
passed into the coating chamber at room temperature.
Three monomers must come together to start the polymerization,
which is nearly impossible in the gas, but like ly on
surfaces, so the gas can penetrate into every nook and
cranny, then polymerize on the surface.  Thus it can
be made thin, conformal, and complete.  It is very intert
(I mean inert) and strong.

best regards
mark

Mark W. Lund, PhD
VP Engineering  >> Soft X-ray Web page http://www.moxtek.com<<
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