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MEMSnet Home: MEMS-Talk: MEMS reliability and long-term stability
MEMS reliability and long-term stability
1999-03-24
Dr. Roumiana Paneva
MEMS reliability and long-term stability
Dr. Roumiana Paneva
1999-03-24
Hello All,

I'm looking for MEMS' specific reliability and long-term stability
standards, models, test methods and experimental results. Bulk
micromachined sensors with anodic or fusion bonded wafers (acceleration
sensors, pressure sensors) are from special interest. Any informations and
suggestions will be deeply appreciated.

Sincerely,
Roumiana

        Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11


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