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MEMSnet Home: MEMS-Talk: Deposition of PDMS films
Deposition of PDMS films
1999-03-24
Marvin Zai
Deposition of PDMS films
Marvin Zai
1999-03-24
Dear MEMS experts,

I am interested in using PDMS films for microfluidics, deposited onto
glass or sputtered SiO2.  My questions are:

1- PDMS is said to bond well to different materials, and to itself, so
   that bonding can be conducted at very low temperatures. Is this true?

2- does the glass or SiO2 surface need treatment prior to PDMS
spin-coating
   to enhance adhesion?  If so, please describe a procedure.

3- how to change the wetting characteristics of the films?

4- how thick a single film of PDMS can be deposited practically without
   cracking?

5- how to handle and dispose of this material?  is PDMS toxic?


Thank you.

Marvin Zai

OMRON CORPORATION
Research and Development Headquarters
Tsukuba-city
Japan


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