Dear MEMS experts,
I am interested in using PDMS films for microfluidics, deposited onto
glass or sputtered SiO2. My questions are:
1- PDMS is said to bond well to different materials, and to itself, so
that bonding can be conducted at very low temperatures. Is this true?
2- does the glass or SiO2 surface need treatment prior to PDMS
spin-coating
to enhance adhesion? If so, please describe a procedure.
3- how to change the wetting characteristics of the films?
4- how thick a single film of PDMS can be deposited practically without
cracking?
5- how to handle and dispose of this material? is PDMS toxic?
Thank you.
Marvin Zai
OMRON CORPORATION
Research and Development Headquarters
Tsukuba-city
Japan