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MEMSnet Home: MEMS-Talk: In-situ Boron doping of polysilicon
In-situ Boron doping of polysilicon
1999-02-02
Matt Wilcox
In-situ Boron doping of polysilicon
Matt Wilcox
1999-02-02
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Does anybody know a source for CVD of in-situ boron doped polysilicon?
I want to do this on 3" squre substrate.

Please let me know.

Thanks

Matt

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