DEAR ALL,
Can anybody give me some information on nano-positioners (for eg. this device
will be used in tunneling accelerometer or gyroscope to position the tunneling
tip in nanometer range) . iam working on nano-positioners with electrostatic
drive using silicon material. It will be helpfull, if you can suggest me some
related papers or books on this. Even if it is obout micropositioners, it is ok.
thanks for your time,
best regards
KUMARAN RAJANGAM
MEMS LAB
NUS
SINGAPORE




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