Answers in text below

> ----------
> From:         Marvin Zai
> Reply To:     Marvin Zai;[email protected]
> Sent:         Thursday, 25 March 1999 3:33 AM
> To:   [email protected]
> Subject:      Deposition of PDMS films
>
> Dear MEMS experts,
>
> I am interested in using PDMS films for microfluidics, deposited onto
> glass or sputtered SiO2.  My questions are:
>
> 1- PDMS is said to bond well to different materials, and to itself, so
>    that bonding can be conducted at very low temperatures. Is this true?
Yes.  Adheres well at room temperature. A cured PDMS film aheres very nicely
to clean SiO2.

> 2- does the glass or SiO2 surface need treatment prior to PDMS
> spin-coating
>    to enhance adhesion?  If so, please describe a procedure.
I recall that brief exposure in an oxygen plasma enhanced adhesion for cured
PDMS films. Since it is a siloxane anything that promotes a clean oxide
surface will enhance adhesion.

> 3- how to change the wetting characteristics of the films?
No direct knowledge on this. PMDS is rather viscous. It flows better at
higher temperature but of course cures faster.

> 4- how thick a single film of PDMS can be deposited practically without
>    cracking?
I have made gaskets up to 20mm thick and 20mm high essentially by pouring
the PDMS into a level mold and then letting gravity do the rest.

> 5- how to handle and dispose of this material?  is PDMS toxic?
Ask the manufacturer but I do not recall any particularly stringent hnadling
procedures.


> Thank you.
>
> Marvin Zai
>
> OMRON CORPORATION
> Research and Development Headquarters
> Tsukuba-city
> Japan
>
>
Dr Alan Wilson
Maritime Platforms Divison
AMRL - DSTO
E'mail: [email protected]
Tel: +61 3 9626 7508
Fax: +61 3 9626 7816 or 7087