Jun,

We are looking at using a system from Tousimis. They make the system to
prepare and preserve 3D biological samples for SEM analysis, but it works
well for the sacrificial etch in MEMs applications. The contact info is
below.

Tousimis
P.O. Box 2189
Rockville, MD  20847

1-800-683-9558
direct line: (301) 881-2450


Jim Culver
Raytheon Systems Company







Jun Zou  on 03/26/99 12:52:54 AM

Please respond to Jun Zou ; Please respond to
      [email protected]

To:   [email protected]
cc:    (bcc: James W Culver/STP/Raytheon/US)

Subject:  Super Critical CO2 Drying Equipment




Hi, Everybody

Right now, a lot of people are practise CO2 drying after the sacrificial
etching.

I wonder whether someone could give me some information about the vendor of
such systems.

Thanks!

Jun


--------------------------
Jun Zou
Micro Actuator,Sensor & System Group, CCSM

319B Microelectronics Lab
208 N.Wright Street
Urbana, IL 61801
USA
Tel:(217)-265-0808
FAx:(217)-244-6375
E-mail: [email protected]
--------------------------