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MEMSnet Home: MEMS-Talk: Re: MEMS manifacturing info
Re: MEMS manifacturing info
1999-03-30
[email protected]
1999-03-31
M.C. Federico Sandoval
1999-03-30
Rajeshuni Ramesham
1999-03-30
Trung Duy Truong
1999-03-31
Yit-shun Leung Ki
1999-04-06
Shile
1999-04-26
Gerhard Lammel
Re: MEMS manifacturing info
Yit-shun Leung Ki
1999-03-31
Hi,

You have probably received this idea 100 times by now but here goes: You
should get "Microfabrication" by Marc Madou.
--
Yit-shun Leung Ki
Graduate Student in Microfluidics
_______________________________________________________________
Institute of Microsystems (IMS)
Dept. of Microengineering,
Batîment BM,
Swiss Federal Inst. of Tech. (EPFL),    TEL: +41 21 693 7818
CH-1015 Lausanne                        FAX: +41 21 693 5950
Switzerland                             URL: dmtwww.epfl.ch/ims


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