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MEMSnet Home: MEMS-Talk: Ohmic contact of Germanium
Ohmic contact of Germanium
1999-04-06
Zeng Wenjiang
Ohmic contact of Germanium
Zeng Wenjiang
1999-04-06
Can I get advice on the ohmic contact to evaporate Germanium ?   The
Germanium is e-beam evaporated at thickness about 0.2 microns.  Which metal
can be used for the contact ?  Is diffusion barrier required ? Is adhesion
layer needed ? Any concerns or recommendations about electrical behavior and
contact resistance ? Any anneal suggested ? Can anybody suggest some general
references about this ?

Thanks in advance.

Zeng Wenjiang
Research Engineer
Institute of Microelectronics, Singapore.
Fax: (65) 7770670
[email protected]


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