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MEMSnet Home: MEMS-Talk: thick polysilicon
thick polysilicon
1999-04-09
K.V.Madanagopal
thick polysilicon
K.V.Madanagopal
1999-04-09
Hi!
Is there some place where I could get thick polysilicon deposited on
oxidized Si wafers?  I am looking for ~10um thick layer.

Thanks
Madan


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