Hi,

You can find this information in :
Low strain sputtered polysilicon for micromechanical structures
T.Abe, M.Reed
MEMS 96
pp 258-262

Sincerely,

#####################################################################
Philippe HELIN, Ph.D.
LIMMS/CNRS-IIS
University of Tokyo,
Tel : (81) 3 3402 6231 ext. 2354
Fax : (81) 3 3470 5103
Email : [email protected]



>Hello,
>I am trying to find information about the annealing condition for
>preventing stress in sputtered polysilion.
>Any contribution will be very appreciated.
>
>Murat Gel
>[email protected]
>
>----
>Murat Gel  [email protected]
>


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