Fundementals of Microfabrication by Marc Madou, CRC Press

-----Original Message-----
From: Fabio Coccetti 
To: [email protected] 
Date: Tuesday, March 30, 1999 12:11 PM
Subject: MEMS manifacturing info


>Does anybody know where I can find a good and complete exposition about all
the
>micromachining techniques (manifacturing processes: masking, etching, and
>whatever) in use up now ?
>
>Thanks a lot for your time
>
>Sincerely, FABIO
>