Have a look in:  Mikkelsen et al. "Improved quality of Zink Oxide thin
films by in situ annealing", Dig. MME'95, or contact Dr. Roger de Reus
(+45 4525 6307, [email protected])

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Matthias Heschel
Microelectronics Center
Technical University of Denmark, Bldg. 345 east
DK-2800 Lyngby