Hi,
check out this page:
http://mems.engr.wisc.edu/research/strain.html
Not much, but maybe a start.
Ralf.


Murat Gel wrote:

> Hello,
> I am trying to find information about the annealing condition for
> preventing stress in sputtered polysilion.
> Any contribution will be very appreciated.
>
> Murat Gel
> [email protected]
>
> ----
> Murat Gel  [email protected]