Have you tried aqua regia to etch Platinum? Otherwise, you could get rid of
Pt by doing a lift-off process. Let me know if this helps.

-Sony Lemoff

>Dear All,
>I am urgently looking for an effect method (preferly wet) to etch electrode
>platinum (Pt) on silicon substrate with a thin layer of Ti. Would you please
>give me help?
>Best regards.
>
>________________________________________________________________
>Dr Kong Lingbing
>School of EEE
>Nanyang Technological University
>Block S1, Nanyang Avenue
>Singapore 639798
>
>Tel: (65) 7906084
>Fax: (65) 7933318
>Email: [email protected]
>________________________________________________________________
>