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MEMSnet Home: MEMS-Talk: RE: thick polysilicon
RE: thick polysilicon
1999-04-10
LIU Ai Qun
RE: thick polysilicon
LIU Ai Qun
1999-04-10
Please check Bosch web and provide foundry services.

Regards

Aiqun

______________________________________________________________
AIQUN LIU  Ph.D
Senior Research Fellow, MEMS Technology
INSTITUTE OF MATERIALS RESEARCH & ENGINEERING
Blk S7, Level 3
National University Of Singapore
SINGAPORE 119260

Tel: (65) 8748161
Fax: (65) 8720785
email: [email protected]
_________________________________________________________________________


> -----Original Message-----
> From: K.V.Madanagopal [SMTP:[email protected]]
> Sent: Saturday, April 10, 1999 4:35 AM
> To:   [email protected]
> Subject:      thick polysilicon
>
> Hi!
> Is there some place where I could get thick polysilicon deposited on
> oxidized Si wafers?  I am looking for ~10um thick layer.
>
> Thanks
> Madan
>
>


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