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MEMSnet Home: MEMS-Talk: Re: thick polysilicon
Re: thick polysilicon
1999-04-10
[email protected]
1999-04-12
Jonathan Bernstein
1999-04-12
Jaideep Mavoori
1999-04-12
Roger Neef
1999-04-12
Pierre-F. Indermulhe
1999-04-12
Pierre-F. Indermulhe
1999-04-12
Mario Robles
Re: thick polysilicon
Pierre-F. Indermulhe
1999-04-12
K.V.Madanagopal wrote:

> Hi!
> Is there some place where I could get thick polysilicon deposited on
> oxidized Si wafers?  I am looking for ~10um thick layer.
>
> Thanks
> Madan

Try the CNM in Barcelona, Spain. They presented some papers a couple of
years ago about thick poly.

Good luck

Pierre


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