Dear MEMS community,
I am looking for the stress strength of pyrex glass like and quartz
wafers. The value of strength depends strongly on flaws and surface
roughness. I would be particularly interested if someone has an idea for
the strength of thin wafers of optical quality wafers (therefore with a
very good polishing and few flawns).
Thanks in advance.
J.-C. Roulet
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Jean-Christophe Roulet Phone:+41 32 7183
210
Institute of Microtechnology Direct:+41 32 7183 264
University of Neuchâtel Fax:+41 32 7183
201
Rue A.-L. Breguet 2 Internet:
HTTP://www-optics.unine.ch
CH-2000 Neuchâtel, Switzerland E-mail:
[email protected]
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