What's the best surface roughness of HF or BOE etching of Pyrex glass? Under
what condition: temperature, HF concentration? What's the etch rate?

Where can I get plastic substrate for making micro-channels? Any references
of the processing on plastic substrate?

Thank you for your time and info.

Ying Xu
MEMS Applications Engineer
phone: (626)-685-5930
fax: (626)-432-5705