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MEMSnet Home: MEMS-Talk: Re: electrochemical method for Pt etching
Re: electrochemical method for Pt etching
1999-04-19
Shile
1999-04-21
[email protected]
Re: electrochemical method for Pt etching
[email protected]
1999-04-21
You should be able to etch Pt with fluorine plasma and Ni can be wet etched
but it will be hard on photoresist. Probable etchant would be aqua regia
Hf:Nitric:Acetic.  Good luck


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