There is a paper on similar device see:

Sensors and Actuators A-49, (1995) pp.51-55. "A fiber optic reflective
displacement micrometer'.  and the reference list



At 12:48 AM 4/16/99 -0400, you wrote:
>
>Hi:
>We are using a laser optical system to measure the deflection of the
>bimetallic cantilever beams. We are not using the interferometer  method.
>Our output signal is a voltage from the PSD(Position Sensitive Dectector),
>and we would like to know how much does the cantilever beam deflect.
>
>Does anyone have such experience to calibrate this kind of measurement?
>I would appreciate any suggestions.
>
>OR some advice on how to measure the deflection of the bimetallic
>cantilever beam(say, a 100um X 50um cantilever).
>
>Thanks,
>Junhua Wu
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Wen H. Ko
Phone: 1-216-368-2071
FAX: 1-216-368-5326
e mail: [email protected]