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MEMSnet Home: MEMS-Talk: Re: MEMS manifacturing info
Re: MEMS manifacturing info
1999-03-30
[email protected]
1999-03-31
M.C. Federico Sandoval
1999-03-30
Rajeshuni Ramesham
1999-03-30
Trung Duy Truong
1999-03-31
Yit-shun Leung Ki
1999-04-06
Shile
1999-04-26
Gerhard Lammel
Re: MEMS manifacturing info
Gerhard Lammel
1999-04-26
Hi Fabio Coccetti,

> Does anybody know where I can find a good and complete exposition about all
the
> micromachining techniques (manifacturing processes: masking, etching, and
> whatever) in use up now ?
>
> Thanks a lot for your time
>
> Sincerely, FABIO

Da kann ich Dir "Grundlagen der Mikrosystemtechnik", G. Gerlach und
W. Dötzel empfehlen, erschienen im Hanser-Verlag.

Gruss

Gerhard

--
Gerhard Lammel
Institut de microsystemes
Ecole Polytechnique Federale de Lausanne (EPFL)
CH-1015 Lausanne, Switzerland
tel: ++41 (0)21 693 65 73
fax: ++41 (0)21 693 59 50
email: [email protected]


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