A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: dry etch Pt
Re: dry etch Pt
1999-04-21
Jayant Neogi
1999-04-22
Stefan Schneider
1999-04-27
[email protected]
Re: dry etch Pt
[email protected]
1999-04-27
CF4 C2F6 with O2 should work if it isn't too thick <150nm
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
MEMS Technology Review
Tanner EDA by Mentor Graphics