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MEMSnet Home: MEMS-Talk: Re: dry etch Pt
Re: dry etch Pt
1999-04-21
Jayant Neogi
1999-04-22
Stefan Schneider
1999-04-27
[email protected]
Re: dry etch Pt
[email protected]
1999-04-27
CF4 C2F6 with O2 should work if it isn't too thick <150nm
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