Dear Fulvio,
I hope the following could help you.

Deposition of thick zinc oxide films with a high resistivity.
Source: Micromachining and Microfabrication Process Technol., SPIE, Vol.
2639 (1995)

Piezoelectric films in silicon-based microactuation structures.
Source: Conference Active Drives for Microengineering Applications, IEE
Colloquium, Vol. 85 (1995)

Ferroelectric thin films for integrated sensor and memory devices.
Source: GEC Journal of Research, Vol. 12 (1995) Iss. 3, Pg. 141-152

Processing of piezocomposites via solid freeform fabrication (SFF)
techniques.
Source: Solid Freeform Fabrication Proc., SFF Symp.,(1996) Pg.
265-272
Regards

Andreas Albrecht
Transfercenter Microelectronics
In den Weiden 7
D-99099 Erfurt
Phone: +49-(0)361-44 20 660     Fax +49-(0)361-44 20 666