> Hi
> Are there other MEMS manufacturers besides MCNC MUMPs?
> Your help is really valuable to me.
> Thanks a lot.
>
>    Sincerely,
>           Dung-An
>
> Phone:
>  Office: (734) 615-0303   Home  : (734) 662-1553
> Address:
>  Office:                               Home:
>   University of Michigan                  411 Longshore Dr.
>   Department of Mechanical Engineering    Ann Arbor, MI 48105
>   3007 EECS, 2350 Hayward                 U.S.A.
>   Ann Arbor, MI 48109-2125
>   U.S.A.
> E-Mail:
>    [email protected]
> Homepage:
>    http://www-personal.engin.umich.edu/~wangd
>
>
>
>

Sandia Nat Lab has a surface micromachining process that is available.

Also some people use MOSIS with post processing

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]