Fabio Coccetti wrote:
>
>  Hallo Everybody,
>
>  -Could you tell me which simulation tools are in use to study the RF
paramiters
>  (Scattering Paramiters ) of HF MEMS devices ?
>
>  -Are they finite difference methods based ?
>
>  -Has anyboby some suggestion on which numerical way to persue such results ?
>
>  THANKS A LOT
>
>  Fabio
>


Fabio,

There are several commercial tools available from Ansoft and HP-EESOF,
as well as others.

jacob