Hello:

     Did anyone ever use the photoresist of  ma-p1275 to do some thick

  layers ?  this PR material is made by Micro Resist Technology in Berlin
....

     Now i'm using JSR  positive photoresist named THB-137N, the softbake

 condition is so critical, could someone suggest me which is better
,hotplate  or

 oven ...  now i use 90 degree C oven baking 30 minutes, after
developement,  i

 found the PR is harden and crisp, ....  please give me some advise ....
____________________________________________________________
 OES, ITRI
 HsiaoLing Liou
 [email protected]