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MEMSnet Home: MEMS-Talk: afm for force displacement of microstructures
afm for force displacement of microstructures
1999-05-07
Alex Freeman
afm for force displacement of microstructures
Alex Freeman
1999-05-07
Hi

Has anyone tried using an AFM to measure coarse force-displacement of
mems structures?  AFM is an overkill but we have a lot of them lying
around.

alex

--
Alex Freeman, Ph.D
Research Scientist
Zyvex
972-235-7881 x219


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